Introduction to Microsystem Technology

Introduction to Microsystem Technology

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A Guide for Students Gerald Gerlach, Wolfram Dotzel ... Miniaturization and integration have thus opened up a new technical field which has many names. ... presented his article a#39;Silicon as a mechanical materiala#39;2 and was the first to describe the entire potential of microsystem technology. ... 1Portion of text is reproduced by permission of The American Introduction to Microsystem Technology: Preface.

Title:Introduction to Microsystem Technology
Author: Gerald Gerlach, Wolfram Dotzel
Publisher:John Wiley & Sons - 2008-04-30

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